Cavendish Kinetics is a privately held MEMS company that has developed 3^rd-generation MEMS technology.  The proprietary NanoMech™ MEMS platform dramatically reduces the cost of MEMS components by reducing their size and eliminating expensive MEMS packaging.

The foundation of the NanoMech™ platform is the formation of sealed cavities between the metal layers of standard IC processes without requiring special materials or equipment. The Nanomech™ MEMS platform does not impact transistor characteristics or any other characteristics of the process.

Currently, RF-MEMS tunable capacitors are being developed and tested for antenna tuning and impedance matching networks for cell phone applications.

Another application using the NanoMech™ platform is a non-volatile memory which benefits from the technology by having a wide temperature operating range, ultra-low power write and native voltage operation.   Other functions supported by the NanoMech process include I/V switches, resonators, temperature sensors, inertial measurement, and image sensors.